SEMI-KLEEN Sapphire Plasma Cleaner
SEMI-KLEEN sapphire remote plasma cleaner 設計用於支撐腐蝕性製程氣體，電漿腔體已被更耐化學腐蝕的藍寶石管取代。真空密封設計和腔室材料選擇已經過最佳化，可支援電漿的腐蝕性自由基。對於需要對石英室進行電漿蝕刻的應用，SEMI-KLEEN sapphire 是比傳統石英室電漿源更好的選擇。
◆ SEMI-KLEEN sapphire remote plasma source 用於沉積薄膜、在 ALD 系統中沉積薄膜之前清潔樣品表面以及清潔金屬表面的碳和氧污染物。
◆ SEMI-KLEEN 電漿源只需 2 秒的氫電漿即可去除 InGaAs 樣品中的碳和氧污染物。
◆ 可用於僅由 turbo pump 或 roughping pump 的後端腔體。它可以在 <0.5mTorr 至超過 2Torr 的壓力範圍內運作。
◆ SEMI-KLEEN 電漿源只需 2 秒的氫電漿即可去除 InGaAs 樣品中的碳和氧污染物。
◆ 可用於僅由 turbo pump 或 roughping pump 的後端腔體。它可以在 <0.5mTorr 至超過 2Torr 的壓力範圍內運作。
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Electrical ratings
◆ Input power for plasma machine：100V-230V AC, 50~60Hz
maximum power：300Watt
connector type：IEC 320 C13
◆ Fuse for the plasma machine
Size：IEC 5X20mm
Type：Slow blown
Current：2 amp for 220~230V AC; 3 amp for 100~110VAC.
◆ Compatible power cord
For countries and regions that use 100~110VAC, voltage rating on the power cord must be higher than 110VAC, the current rating should be equal or higher than 10 amps.
For countries and regions that uses 220~230VAC, voltage ratings on the power cord should be higher than 230VAC, the current rating should be equal or higher than 5 amps.
◆ Input power for plasma machine：100V-230V AC, 50~60Hz
maximum power：300Watt
connector type：IEC 320 C13
◆ Fuse for the plasma machine
Size：IEC 5X20mm
Type：Slow blown
Current：2 amp for 220~230V AC; 3 amp for 100~110VAC.
◆ Compatible power cord
For countries and regions that use 100~110VAC, voltage rating on the power cord must be higher than 110VAC, the current rating should be equal or higher than 10 amps.
For countries and regions that uses 220~230VAC, voltage ratings on the power cord should be higher than 230VAC, the current rating should be equal or higher than 5 amps.
